Silicon wafer - Thermophysical Properties

In this example, the thermophysical properties of a silicon wafer were measured with the LFA 457 MicroFlash®®.

In the temperature range from -100°C to 500°C, the thermal conductivity and thermal diffusivity continuously decrease.
Determination of the specific heat was carried out with the DSC 204 F1 Phoenix®®. The standard deviation of the data points is < 1%.

LFA and DSC measurement of a silicon wafer between -100°C and 500°C.